Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas

Bastien Bruneau, I Korolov, T Lafleur, Timo Gans, Deborah O'Connell, Arthur Greb, A Derzsi, Z Donko, S Brandt, E Schüngel, J Schulze, Johnson E, J-P Booth

Physics

Research output: Contribution to journal › Article › peer-review

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Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
Gans, T. (Principal investigator), O'Connell, D. (Co-investigator) & Wagenaars, E. (Co-investigator)
EPSRC
1/07/13 → 21/12/18
Project: Research project (funded) › Research
Interactions between micro-plasma devices
O'Connell, D. (Principal investigator)
EPSRC
1/06/11 → 31/03/15
Project: Research project (funded) › Research

Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas

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Metrology concepts for a new generation of plasma manufacturing with atom-scale precision

Interactions between micro-plasma devices