Original language | English |
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Patent number | PCT/JP2014/078816 |
IPC | H01L 29/82 (2006.01), B81B 5/00 (2006.01), H01L 35/14 (2006.01), H01L 37/00 (2006.01), H01L 43/08 (2006.01) |
Publication status | Published - 29 Oct 2014 |
Original language | English |
---|---|
Patent number | PCT/JP2014/078816 |
IPC | H01L 29/82 (2006.01), B81B 5/00 (2006.01), H01L 35/14 (2006.01), H01L 37/00 (2006.01), H01L 43/08 (2006.01) |
Publication status | Published - 29 Oct 2014 |