Stabilized emission from micro-field emitter for electron microscopy

L Chen; M M El-Gomati

doi:10.1016/j.microrel.2005.10.005

Stabilized emission from micro-field emitter for electron microscopy

L Chen, M M El-Gomati

Electronic Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Micro-fabricated field emitter for the application in miniaturized scanning electron microscope (MSEM) was fabricated on silicon substrate. Field emission studies of the micro-fabricated field emitter were carried out in an ultra high vacuum system. A simple voltage controlled feedback circuit was designed and used to regulate the gate voltage in order to improve the emission current stability of the micro-fabricated field emitter. Preliminary results showed that the emission current fluctuation ((I-max - I-min)/I-ave) was reduced from 80% without feedback current stabilizer to less than 1% with the circuit control. (c) 2005 Elsevier Ltd. All rights reserved.

Original language	English
Pages (from-to)	1209-1213
Number of pages	5
Journal	Microelectronics and Reliability
Volume	46
Issue number	7
DOIs	https://doi.org/10.1016/j.microrel.2005.10.005
Publication status	Published - Jul 2006

Keywords

FABRICATION
SYSTEM

Access to Document

10.1016/j.microrel.2005.10.005

Cite this

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title = "Stabilized emission from micro-field emitter for electron microscopy",

abstract = "Micro-fabricated field emitter for the application in miniaturized scanning electron microscope (MSEM) was fabricated on silicon substrate. Field emission studies of the micro-fabricated field emitter were carried out in an ultra high vacuum system. A simple voltage controlled feedback circuit was designed and used to regulate the gate voltage in order to improve the emission current stability of the micro-fabricated field emitter. Preliminary results showed that the emission current fluctuation ((I-max - I-min)/I-ave) was reduced from 80% without feedback current stabilizer to less than 1% with the circuit control. (c) 2005 Elsevier Ltd. All rights reserved.",

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author = "L Chen and El-Gomati, {M M}",

year = "2006",

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language = "English",

volume = "46",

pages = "1209--1213",

journal = "Microelectronics and Reliability",

number = "7",

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T1 - Stabilized emission from micro-field emitter for electron microscopy

AU - Chen, L

AU - El-Gomati, M M

PY - 2006/7

Y1 - 2006/7

N2 - Micro-fabricated field emitter for the application in miniaturized scanning electron microscope (MSEM) was fabricated on silicon substrate. Field emission studies of the micro-fabricated field emitter were carried out in an ultra high vacuum system. A simple voltage controlled feedback circuit was designed and used to regulate the gate voltage in order to improve the emission current stability of the micro-fabricated field emitter. Preliminary results showed that the emission current fluctuation ((I-max - I-min)/I-ave) was reduced from 80% without feedback current stabilizer to less than 1% with the circuit control. (c) 2005 Elsevier Ltd. All rights reserved.

AB - Micro-fabricated field emitter for the application in miniaturized scanning electron microscope (MSEM) was fabricated on silicon substrate. Field emission studies of the micro-fabricated field emitter were carried out in an ultra high vacuum system. A simple voltage controlled feedback circuit was designed and used to regulate the gate voltage in order to improve the emission current stability of the micro-fabricated field emitter. Preliminary results showed that the emission current fluctuation ((I-max - I-min)/I-ave) was reduced from 80% without feedback current stabilizer to less than 1% with the circuit control. (c) 2005 Elsevier Ltd. All rights reserved.

KW - FABRICATION

KW - SYSTEM

U2 - 10.1016/j.microrel.2005.10.005

DO - 10.1016/j.microrel.2005.10.005

M3 - Article

VL - 46

SP - 1209

EP - 1213

JO - Microelectronics and Reliability

JF - Microelectronics and Reliability

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