Study of bevelled InP-based heterostructures by low energy SEM and AES

R Srnanek; A Satka; J Liday; P Vogrincic; J Kovac; M Zadrazil; L Frank; M El Gomati

Study of bevelled InP-based heterostructures by low energy SEM and AES

R Srnanek, A Satka, J Liday, P Vogrincic, J Kovac, M Zadrazil, L Frank, M El Gomati

Electronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We report on low energy scanning electron microscopy characterisation of chemically bevelled InP/InGaAs/InGaAlAs and InP/InGaAsP heterostructures. A thickness of 3 nm for InP/InGaAlAs, 2 nm for InGaAs/InGaAlAs and 4-6 nn for InP/InGaAsP interfaces were obtained. These were compared with measurements by Auger electron spectroscopy (AES).

Original language	English
Title of host publication	ELECTRON MICROSCOPY AND ANALYSIS 1997
Editors	JM Rodenburg
Place of Publication	BRISTOL
Publisher	IOP Publishing
Pages	453-456
Number of pages	4
ISBN (Print)	0-7503-0441-3
Publication status	Published - 1997
Event	1997 Biennial Meeting of the Electron-Microscopy-and-Analysis-Group of the Institute-of-Physics (EMAG 97) - CAMBRIDGE Duration: 2 Sept 1997 → 5 Sept 1997

Conference

Conference	1997 Biennial Meeting of the Electron-Microscopy-and-Analysis-Group of the Institute-of-Physics (EMAG 97)
City	CAMBRIDGE
Period	2/09/97 → 5/09/97

Keywords

CATHODE LENS

Cite this

@inproceedings{8fa167d0cfa848e0b51d17aa1df1c6a2,

title = "Study of bevelled InP-based heterostructures by low energy SEM and AES",

abstract = "We report on low energy scanning electron microscopy characterisation of chemically bevelled InP/InGaAs/InGaAlAs and InP/InGaAsP heterostructures. A thickness of 3 nm for InP/InGaAlAs, 2 nm for InGaAs/InGaAlAs and 4-6 nn for InP/InGaAsP interfaces were obtained. These were compared with measurements by Auger electron spectroscopy (AES).",

keywords = "CATHODE LENS",

author = "R Srnanek and A Satka and J Liday and P Vogrincic and J Kovac and M Zadrazil and L Frank and {El Gomati}, M",

year = "1997",

language = "English",

isbn = "0-7503-0441-3",

pages = "453--456",

editor = "JM Rodenburg",

booktitle = "ELECTRON MICROSCOPY AND ANALYSIS 1997",

publisher = "IOP Publishing",

address = "United Kingdom",

note = "1997 Biennial Meeting of the Electron-Microscopy-and-Analysis-Group of the Institute-of-Physics (EMAG 97) ; Conference date: 02-09-1997 Through 05-09-1997",

}

Srnanek, R, Satka, A, Liday, J, Vogrincic, P, Kovac, J, Zadrazil, M, Frank, L & El Gomati, M 1997, Study of bevelled InP-based heterostructures by low energy SEM and AES. in JM Rodenburg (ed.), ELECTRON MICROSCOPY AND ANALYSIS 1997. IOP Publishing, BRISTOL, pp. 453-456, 1997 Biennial Meeting of the Electron-Microscopy-and-Analysis-Group of the Institute-of-Physics (EMAG 97), CAMBRIDGE, 2/09/97.

TY - GEN

T1 - Study of bevelled InP-based heterostructures by low energy SEM and AES

AU - Srnanek, R

AU - Satka, A

AU - Liday, J

AU - Vogrincic, P

AU - Kovac, J

AU - Zadrazil, M

AU - Frank, L

AU - El Gomati, M

PY - 1997

Y1 - 1997

N2 - We report on low energy scanning electron microscopy characterisation of chemically bevelled InP/InGaAs/InGaAlAs and InP/InGaAsP heterostructures. A thickness of 3 nm for InP/InGaAlAs, 2 nm for InGaAs/InGaAlAs and 4-6 nn for InP/InGaAsP interfaces were obtained. These were compared with measurements by Auger electron spectroscopy (AES).

AB - We report on low energy scanning electron microscopy characterisation of chemically bevelled InP/InGaAs/InGaAlAs and InP/InGaAsP heterostructures. A thickness of 3 nm for InP/InGaAlAs, 2 nm for InGaAs/InGaAlAs and 4-6 nn for InP/InGaAsP interfaces were obtained. These were compared with measurements by Auger electron spectroscopy (AES).

KW - CATHODE LENS

M3 - Conference contribution

SN - 0-7503-0441-3

SP - 453

EP - 456

BT - ELECTRON MICROSCOPY AND ANALYSIS 1997

A2 - Rodenburg, JM

PB - IOP Publishing

CY - BRISTOL

T2 - 1997 Biennial Meeting of the Electron-Microscopy-and-Analysis-Group of the Institute-of-Physics (EMAG 97)

Y2 - 2 September 1997 through 5 September 1997

ER -