Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects

E Schüngel, I Korolov, Bastien Bruneau, A Derzsi, Erik V. Johnson, Deborah O'Connell, Timo Gans, Jean-Paul Booth, Z Donko, J. Schulze

Physics

Research output: Contribution to journal › Article › peer-review

1 results

Finished

Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
Gans, T. (Principal investigator), O'Connell, D. (Co-investigator) & Wagenaars, E. (Co-investigator)
EPSRC
1/07/13 → 21/12/18
Project: Research project (funded) › Research