The challenge of revealing and tailoring the dynamics of radio-frequency plasmas

T. Gans; D. O'Connell; V. Schulz-von der Gathen; J. Waskoenig

doi:10.1088/0963-0252/19/3/034010

The challenge of revealing and tailoring the dynamics of radio-frequency plasmas

T. Gans, D. O'Connell, V. Schulz-von der Gathen, J. Waskoenig

Physics

Research output: Contribution to journal › Article › peer-review

Abstract

The complex dynamics of ionization and excitation mechanisms in capacitively coupled radio-frequency plasmas is discussed for single-and dual-frequency operations in low-pressure and atmospheric pressure plasmas. Electrons are energized through the dynamics of electric fields in the vicinity of the plasma boundary sheaths. Distinctly different power dissipation mechanisms can either co-exist or initiate mode transitions exhibiting characteristic spatio-temporal ionization structures. Phase resolved optical emission spectroscopy, in combination with adequate modelling of the population dynamics of excited states, and numerical simulations reveal dissipation associated with sheath expansion, sheath collapse, transient electron avalanches and wave-particle interactions. In dual-frequency systems the relative phase between the two frequency components provides additional strategies to tailor the plasma dynamics.

Original language	English
Article number	034010
Number of pages	6
Journal	Plasma sources science & technology
Volume	19
Issue number	3
DOIs	https://doi.org/10.1088/0963-0252/19/3/034010
Publication status	Published - Jun 2010

Keywords

ROTATIONAL STATE POPULATIONS
FUNCTIONAL SEPARATION
COUPLED PLASMA
DISCHARGES
SPECTROSCOPY
IONIZATION
EXCITATION
HELIUM
MODELS
SPACE

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abstract = "The complex dynamics of ionization and excitation mechanisms in capacitively coupled radio-frequency plasmas is discussed for single-and dual-frequency operations in low-pressure and atmospheric pressure plasmas. Electrons are energized through the dynamics of electric fields in the vicinity of the plasma boundary sheaths. Distinctly different power dissipation mechanisms can either co-exist or initiate mode transitions exhibiting characteristic spatio-temporal ionization structures. Phase resolved optical emission spectroscopy, in combination with adequate modelling of the population dynamics of excited states, and numerical simulations reveal dissipation associated with sheath expansion, sheath collapse, transient electron avalanches and wave-particle interactions. In dual-frequency systems the relative phase between the two frequency components provides additional strategies to tailor the plasma dynamics.",

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T1 - The challenge of revealing and tailoring the dynamics of radio-frequency plasmas

AU - Gans, T.

AU - O'Connell, D.

AU - Schulz-von der Gathen, V.

AU - Waskoenig, J.

PY - 2010/6

Y1 - 2010/6

N2 - The complex dynamics of ionization and excitation mechanisms in capacitively coupled radio-frequency plasmas is discussed for single-and dual-frequency operations in low-pressure and atmospheric pressure plasmas. Electrons are energized through the dynamics of electric fields in the vicinity of the plasma boundary sheaths. Distinctly different power dissipation mechanisms can either co-exist or initiate mode transitions exhibiting characteristic spatio-temporal ionization structures. Phase resolved optical emission spectroscopy, in combination with adequate modelling of the population dynamics of excited states, and numerical simulations reveal dissipation associated with sheath expansion, sheath collapse, transient electron avalanches and wave-particle interactions. In dual-frequency systems the relative phase between the two frequency components provides additional strategies to tailor the plasma dynamics.

AB - The complex dynamics of ionization and excitation mechanisms in capacitively coupled radio-frequency plasmas is discussed for single-and dual-frequency operations in low-pressure and atmospheric pressure plasmas. Electrons are energized through the dynamics of electric fields in the vicinity of the plasma boundary sheaths. Distinctly different power dissipation mechanisms can either co-exist or initiate mode transitions exhibiting characteristic spatio-temporal ionization structures. Phase resolved optical emission spectroscopy, in combination with adequate modelling of the population dynamics of excited states, and numerical simulations reveal dissipation associated with sheath expansion, sheath collapse, transient electron avalanches and wave-particle interactions. In dual-frequency systems the relative phase between the two frequency components provides additional strategies to tailor the plasma dynamics.

KW - ROTATIONAL STATE POPULATIONS

KW - FUNCTIONAL SEPARATION

KW - COUPLED PLASMA

KW - DISCHARGES

KW - SPECTROSCOPY

KW - IONIZATION

KW - EXCITATION

KW - HELIUM

KW - MODELS

KW - SPACE

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U2 - 10.1088/0963-0252/19/3/034010

DO - 10.1088/0963-0252/19/3/034010

M3 - Article

SN - 0963-0252

VL - 19

JO - Plasma sources science & technology

JF - Plasma sources science & technology

IS - 3

M1 - 034010

ER -

The challenge of revealing and tailoring the dynamics of radio-frequency plasmas

Abstract

Keywords

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