The influence of surface properties on the plasma dynamics in radio-frequency driven oxygen plasmas: Measurements and simulations

TY - JOUR

T1 - The influence of surface properties on the plasma dynamics in radio-frequency driven oxygen plasmas

T2 - Measurements and simulations

AU - Greb, A.

AU - Niemi, K.

AU - O'Connell, D.

AU - Gans, T.

PY - 2013/12/9

Y1 - 2013/12/9

N2 - Plasma parameters and dynamics in capacitively coupled oxygen plasmas are investigated for different surface conditions. Metastable species concentration, electronegativity, spatial distribution of particle densities as well as the ionization dynamics are significantly influenced by the surface loss probability of metastable singlet delta oxygen (SDO). Simulated surface conditions are compared to experiments in the plasma-surface interface region using phase resolved optical emission spectroscopy. It is demonstrated how in-situ measurements of excitation features can be used to determine SDO surface loss probabilities for different surface materials.

AB - Plasma parameters and dynamics in capacitively coupled oxygen plasmas are investigated for different surface conditions. Metastable species concentration, electronegativity, spatial distribution of particle densities as well as the ionization dynamics are significantly influenced by the surface loss probability of metastable singlet delta oxygen (SDO). Simulated surface conditions are compared to experiments in the plasma-surface interface region using phase resolved optical emission spectroscopy. It is demonstrated how in-situ measurements of excitation features can be used to determine SDO surface loss probabilities for different surface materials.

UR - http://www.scopus.com/inward/record.url?scp=84890454910&partnerID=8YFLogxK

U2 - 10.1063/1.4841675

DO - 10.1063/1.4841675

M3 - Article

AN - SCOPUS:84890454910

SN - 0003-6951

VL - 103

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 24

M1 - 244101

ER -