TY - JOUR
T1 - Tomographic nanofabrication of ultrasharp three-dimensional nanostructures
AU - Thirunavukkarasu, Gnanavel
AU - Z Saghi, Thirunavukkarasu G, Y Peng, B J Inkson, M R Gibbs and G Moebus
PY - 2008
Y1 - 2008
N2 - We present the extension of electron tomography from a pure characterization technique into a three-dimensional nanofabrication technique using focused electron beams in the scanning transmission electron microscope. Two-dimensional surface patterning techniques are insufficient to achieve full three-dimensional nanosculpting, instead, multiple sample rotations under the beam are required. We demonstrate fabrication of ultrafine tips and hollow structures with applications in scanning probe microscopy, atom probe tomography, or in magnetoconductance of nanobridges. A sharpened tip radius of <3 nm is achieved, an order of magnitude finer than with standard methods.
AB - We present the extension of electron tomography from a pure characterization technique into a three-dimensional nanofabrication technique using focused electron beams in the scanning transmission electron microscope. Two-dimensional surface patterning techniques are insufficient to achieve full three-dimensional nanosculpting, instead, multiple sample rotations under the beam are required. We demonstrate fabrication of ultrafine tips and hollow structures with applications in scanning probe microscopy, atom probe tomography, or in magnetoconductance of nanobridges. A sharpened tip radius of <3 nm is achieved, an order of magnitude finer than with standard methods.
M3 - Article
SN - 0003-6951
VL - 93
JO - Applied Physics Letters
JF - Applied Physics Letters
IS - 153102
ER -