TY - CHAP
T1 - Toward quantitative scanning electron microscopy
AU - El-Gomati, Mohamed M.
AU - Walker, Christopher G H
PY - 2014/1/1
Y1 - 2014/1/1
N2 - Scanning Electron Microscopy (SEM) continues to play an important role in the advancement of our understanding of high-resolution imaging of solid surfaces. But, the instrument has the disadvantage of it being fully or semi-quantitative using either of the two most basic signals obtained; secondary and backscattered electrons. The study of the backscattering and secondary electron emission from metals continues to reveal a new understanding of the behavior of low-energy electrons in metals. It is clear from the results reported that the secondary electron emission in metals is influenced considerably by the secondary electron inelastic mean-free path. This can lead to an explanation of the apparent correlation between the secondary electron coefficient of a metal and its work function. The results also show that contamination effects need to be taken into account if there is any attempt to be made at quantifying SEM measurements, particularly when using low-energy electrons, as is the case with studies of small dimensions.
AB - Scanning Electron Microscopy (SEM) continues to play an important role in the advancement of our understanding of high-resolution imaging of solid surfaces. But, the instrument has the disadvantage of it being fully or semi-quantitative using either of the two most basic signals obtained; secondary and backscattered electrons. The study of the backscattering and secondary electron emission from metals continues to reveal a new understanding of the behavior of low-energy electrons in metals. It is clear from the results reported that the secondary electron emission in metals is influenced considerably by the secondary electron inelastic mean-free path. This can lead to an explanation of the apparent correlation between the secondary electron coefficient of a metal and its work function. The results also show that contamination effects need to be taken into account if there is any attempt to be made at quantifying SEM measurements, particularly when using low-energy electrons, as is the case with studies of small dimensions.
KW - Auger electron spectroscopy (AES)
KW - Backscattering coefficient
KW - dopant contrast
KW - energy-dispersive X-ray spectroscopy (EDS)
KW - scanning electron microscopy (SEM)
KW - secondary electron yield
UR - http://www.scopus.com/inward/record.url?scp=84898481161&partnerID=8YFLogxK
U2 - 10.1016/B978-0-12-800265-0.00001-1
DO - 10.1016/B978-0-12-800265-0.00001-1
M3 - Chapter
AN - SCOPUS:84898481161
SN - 9780128002650
VL - 183
T3 - Advances in Imaging and Electron Physics
SP - 1
EP - 40
BT - Advances in Imaging and Electron Physics
PB - Elsevier
ER -