Towards a Hybrid Mass Sensing System by Combining a QCM Mass Sensor with a 3-DOF Mode Localized Coupled Resonator Stiffness Sensor

TY - JOUR

T1 - Towards a Hybrid Mass Sensing System by Combining a QCM Mass Sensor with a 3-DOF Mode Localized Coupled Resonator Stiffness Sensor

AU - Wang, Yuan

AU - Liu, Huafeng

AU - Wang, Chen

AU - Zhao, Chun

AU - Redoute, Jean Michel

AU - Stoukatch, Serguei

AU - Xiao, Qijun

AU - Tu, Liang Cheng

AU - Kraft, Michael

N1 - Funding Information: Manuscript received October 28, 2020; revised December 9, 2020, December 27, 2020, and January 6, 2021; accepted January 12, 2021. Date of publication January 18, 2021; date of current version March 5, 2021. This work was supported by the National Key Research and Development Program of China under Grant 2018YFB2002300. The associate editor coordinating the review of this article and approving it for publication was Dr. Yong Zhu. (Corresponding authors: Huafeng Liu; Chun Zhao; Chen Wang.) Yuan Wang, Huafeng Liu, Chun Zhao, and Liang-Cheng Tu are with the PGMF, Huazhong University of Science and Technology, Wuhan 430074, China, also with the MOE Key Laboratory of Fundamental Physical Quantities Measurement, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, and also with the Hubei Key Laboratory of Gravitation and Quantum Physics, Huazhong University of Science and Technology, Wuhan 430074, China (e-mail: [email protected]; [email protected]; [email protected]; [email protected]). Publisher Copyright: © 2001-2012 IEEE.

PY - 2021/1/18

Y1 - 2021/1/18

N2 - This paper describes a hybrid mass sensing system comprising a QCM (quartz crystal microbalance) mass sensor operating under atmospheric pressure and a 3-DOF mode localized coupled resonator operating in vacuum. Nanoparticles as consecutive mass perturbations are added onto the QCM, the output signals with respect to the amount of mass change are then being manipulated to generate electrostatic forces. Subsequently, the electrostatic forces act on the 3-DOF mode localized coupled resonator as external stiffness perturbations. The output metrics of the hybrid system were defined as: the resonant frequency shifts, vibration amplitude changes, and the changes in resonance amplitude ratio. Measured data was analyzed for these metrics and compared. This work demonstrated that the proposed hybrid mass sensing system attained a ${2.5\times }10^{\text 6}{N}{(\text{m}\bullet \text{kg})}^{-1}$ mass to stiffness transduction factor, and has the potential to be employed as a direct liquid contact biochemical transducer.

AB - This paper describes a hybrid mass sensing system comprising a QCM (quartz crystal microbalance) mass sensor operating under atmospheric pressure and a 3-DOF mode localized coupled resonator operating in vacuum. Nanoparticles as consecutive mass perturbations are added onto the QCM, the output signals with respect to the amount of mass change are then being manipulated to generate electrostatic forces. Subsequently, the electrostatic forces act on the 3-DOF mode localized coupled resonator as external stiffness perturbations. The output metrics of the hybrid system were defined as: the resonant frequency shifts, vibration amplitude changes, and the changes in resonance amplitude ratio. Measured data was analyzed for these metrics and compared. This work demonstrated that the proposed hybrid mass sensing system attained a ${2.5\times }10^{\text 6}{N}{(\text{m}\bullet \text{kg})}^{-1}$ mass to stiffness transduction factor, and has the potential to be employed as a direct liquid contact biochemical transducer.

KW - Coupled resonator

KW - mass sensing

KW - mode localization

KW - QCM

UR - http://www.scopus.com/inward/record.url?scp=85099733753&partnerID=8YFLogxK

U2 - 10.1109/JSEN.2021.3052046

DO - 10.1109/JSEN.2021.3052046

M3 - Article

AN - SCOPUS:85099733753

SN - 1530-437X

VL - 21

SP - 8988

EP - 8997

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

IS - 7

M1 - 9326368

ER -