Ultra-Sensitive Force Transduction in Weakly Coupled Resonators

Hemin Zhang; Milind Pandit; Jiangkun Sun; Dongyang Chen; Guillermo Sobreviela; Chun Zhao; Ashwin Seshia

doi:10.1109/MEMS46641.2020.9056267

Ultra-Sensitive Force Transduction in Weakly Coupled Resonators

Hemin Zhang^*, Milind Pandit, Jiangkun Sun, Dongyang Chen, Guillermo Sobreviela, Chun Zhao, Ashwin Seshia

^*Corresponding author for this work

Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper, for the first time, reports on a transducer configuration employing weakly coupled resonators demonstrating significant modal overlap. Existing multimode/mode-localized sensors conventionally operate in a regime where modal overlap is negligible; however, theoretically, the sensitivity of such systems significantly increases as the coupling strength between resonators is reduced, moving the system to a regime described by modal overlap. In this work, operation in the modal overlap regime is made possible with consequent benefits in input-referred resolution and stability. Specifically, a coupled resonator microsystem subject to electrostatic stiffness perturbations shows a sensitivity enhancement of 33682 and an input-referred amplitude ratio stability of 28.2ppb, demonstrating a ∼3x improvement in resolution compared to the resonant frequency shift technique.

Original language	English
Title of host publication	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Publisher	IEEE
Pages	795-798
Number of pages	4
ISBN (Electronic)	9781728135809
DOIs	https://doi.org/10.1109/MEMS46641.2020.9056267
Publication status	Published - 6 Apr 2020
Event	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada Duration: 18 Jan 2020 → 22 Jan 2020

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2020-January
ISSN (Print)	1084-6999

Conference

Conference	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Country/Territory	Canada
City	Vancouver
Period	18/01/20 → 22/01/20

Bibliographical note

Publisher Copyright:
© 2020 IEEE.

Keywords

amplitude ratio
high-sensitivity
modal overlap
sensors
Vibration mode localization
weak coupling

Access to Document

10.1109/MEMS46641.2020.9056267

Cite this

Zhang, H., Pandit, M., Sun, J., Chen, D., Sobreviela, G., Zhao, C., & Seshia, A. (2020). Ultra-Sensitive Force Transduction in Weakly Coupled Resonators. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 795-798). Article 9056267 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January). IEEE. https://doi.org/10.1109/MEMS46641.2020.9056267

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title = "Ultra-Sensitive Force Transduction in Weakly Coupled Resonators",

abstract = "This paper, for the first time, reports on a transducer configuration employing weakly coupled resonators demonstrating significant modal overlap. Existing multimode/mode-localized sensors conventionally operate in a regime where modal overlap is negligible; however, theoretically, the sensitivity of such systems significantly increases as the coupling strength between resonators is reduced, moving the system to a regime described by modal overlap. In this work, operation in the modal overlap regime is made possible with consequent benefits in input-referred resolution and stability. Specifically, a coupled resonator microsystem subject to electrostatic stiffness perturbations shows a sensitivity enhancement of 33682 and an input-referred amplitude ratio stability of 28.2ppb, demonstrating a ∼3x improvement in resolution compared to the resonant frequency shift technique.",

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doi = "10.1109/MEMS46641.2020.9056267",

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Zhang, H, Pandit, M, Sun, J, Chen, D, Sobreviela, G, Zhao, C & Seshia, A 2020, Ultra-Sensitive Force Transduction in Weakly Coupled Resonators. in 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020., 9056267, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2020-January, IEEE, pp. 795-798, 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020, Vancouver, Canada, 18/01/20. https://doi.org/10.1109/MEMS46641.2020.9056267

Ultra-Sensitive Force Transduction in Weakly Coupled Resonators. / Zhang, Hemin; Pandit, Milind; Sun, Jiangkun et al.
33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. IEEE, 2020. p. 795-798 9056267 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Zhang, Hemin

AU - Pandit, Milind

AU - Sun, Jiangkun

AU - Chen, Dongyang

AU - Sobreviela, Guillermo

AU - Zhao, Chun

AU - Seshia, Ashwin

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N2 - This paper, for the first time, reports on a transducer configuration employing weakly coupled resonators demonstrating significant modal overlap. Existing multimode/mode-localized sensors conventionally operate in a regime where modal overlap is negligible; however, theoretically, the sensitivity of such systems significantly increases as the coupling strength between resonators is reduced, moving the system to a regime described by modal overlap. In this work, operation in the modal overlap regime is made possible with consequent benefits in input-referred resolution and stability. Specifically, a coupled resonator microsystem subject to electrostatic stiffness perturbations shows a sensitivity enhancement of 33682 and an input-referred amplitude ratio stability of 28.2ppb, demonstrating a ∼3x improvement in resolution compared to the resonant frequency shift technique.

AB - This paper, for the first time, reports on a transducer configuration employing weakly coupled resonators demonstrating significant modal overlap. Existing multimode/mode-localized sensors conventionally operate in a regime where modal overlap is negligible; however, theoretically, the sensitivity of such systems significantly increases as the coupling strength between resonators is reduced, moving the system to a regime described by modal overlap. In this work, operation in the modal overlap regime is made possible with consequent benefits in input-referred resolution and stability. Specifically, a coupled resonator microsystem subject to electrostatic stiffness perturbations shows a sensitivity enhancement of 33682 and an input-referred amplitude ratio stability of 28.2ppb, demonstrating a ∼3x improvement in resolution compared to the resonant frequency shift technique.

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Zhang H, Pandit M, Sun J, Chen D, Sobreviela G, Zhao C et al. Ultra-Sensitive Force Transduction in Weakly Coupled Resonators. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. IEEE. 2020. p. 795-798. 9056267. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS46641.2020.9056267

Ultra-Sensitive Force Transduction in Weakly Coupled Resonators

Abstract

Publication series

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Bibliographical note

Keywords

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