Ultrahigh vacuum and low-temperature cleaning of oxide surfaces using a low-concentration ozone beam

Andrew Pratt, Patrizio Graziosi, Ilaria Bergenti, Mirko Prezioso, Alek Dediu, Yasushi Yamauchi

Research output: Contribution to journalArticlepeer-review

Abstract

We present a novel method of delivering a low-concentration (<15%) ozone beam to an ultra-high vacuum environment for the purpose of cleaning and dosing experimental samples through oxidation processing. The system described is safe, low-cost, and practical and overcomes the limitations of ozone transport in the molecular flow environment of high or ultrahigh vacuum whilst circumventing the use of pure ozone gas which is potentially highly explosive. The effectiveness of this method in removing surface contamination is demonstrated through comparison of hightemperature annealing of a simple oxide (MgO) in ozone and oxygen environments as monitored using quadrupole mass spectroscopy and Auger electron spectroscopy. Additionally, we demonstrate the potential of ozone for obtaining clean complex oxide surfaces without the need for high temperature annealing which may significantly alter surface structure.
Original languageEnglish
Article number075116
Number of pages6
JournalReview of Scientific Instruments
Volume85
Issue number7
DOIs
Publication statusPublished - Jul 2014

Keywords

  • OZONE
  • OXIDATION PROCESSES
  • ULTRAHIGH VACUUM
  • SURFACE CLEANING
  • OXIDES

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