Why is it that differently doped regions in semiconductors are visible in low voltage SEM?

M El-Gomati, T Wells, I Mullerova, L Frank, H Jayakody

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)288-292
Number of pages5
JournalIEEE Transactions on Electron Devices
Volume51
Issue number2
Publication statusPublished - 2004

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